Sensing tilt with MEMS accelerometers

被引：111

作者：

Luczak, Sergiusz ^{[1
]}

Oleksiuk, Waldemar ^{[1
]}

Bodnicki, Maciej ^{[1
]}

机构：

[1] Warsaw Univ Technol, Fac Mechatron, Inst Micromech & Photon, Div Designing Precis Devices, PL-02525 Warsaw, Poland

来源：

IEEE SENSORS JOURNAL | 2006年 / 6卷 / 06期

关键词：

accelerometer; accuracy; measurements; micro-electromechanical systems (MEMS); tilt sensor;

D O I：

10.1109/JSEN.2006.881433

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A miniature tilt sensor made of standard micro-electromechanical systems accelerometers and with an accuracy of 0.3 degrees over the full measurement range of pitch and roll is presented. Such sensor performance has been achieved, owing to the application of an original method of determining tilt angles, which is described in this paper. Experimental studies performed on a physical model of the sensor are discussed, and ways on improving the performance of the sensor are briefly introduced.

引用

页码：1669 / 1675

页数：7

共 28 条

[1] Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers [J].