Nonfluorinated volatile copper(I) 1,3-diketiminates as precursors for Cu metal deposition via atomic layer deposition

被引：45

作者：

Park, Kyung-Ho ^{[1
]}

Bradley, Alexander Z. ^{[1
]}

Thompson, Jeffery S. ^{[1
]}

Marshall, Will J. ^{[1
]}

机构：

[1] DuPont Co Inc, Cent Res & Dev, Expt Stn, Wilmington, DE 19880 USA

来源：

INORGANIC CHEMISTRY | 2006年 / 45卷 / 21期

关键词：

D O I：

10.1021/ic061016e

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

Novel nonfluorinated Cu(diketiminate) L complexes with L = neutral olefinic ligand have been prepared as stable, volatile Cu( I) precursors for the deposition of copper films by an atomic layer deposition (ALD) process. Among them, the complexes of 4-a and 5-a are the most volatile and stable at low temperature (55 degrees C). A clean, conformal copper film was deposited at 120 degrees C in an ALD process. These Cu(I) complexes are the first examples of nonfluorinated copper(I) diketiminates that can be readily applied to an industrial microelectronic fabrication process.

引用

页码：8480 / 8482

页数：3

共 25 条

[1] Electronic structure and electrophilic reactivity of discrete copper diphenylcarbenes [J].

Badiei, YM ;

Warren, TH .

JOURNAL OF ORGANOMETALLIC CHEMISTRY, 2005, 690 (24-25) :5989-6000

[2] Facile synthesis of a novel class of organometalloid-containing ligands, the sila-β-diketones:: preparation and physical and structural characterization of the copper(II) complexes, Cu[R′C(O)CHC(O)SiR3]2 [J].

Banger, KK ;

Ngo, SC ;

Higashiya, S ;

Claessen, RU ;

Bousman, KS ;

Lim, PN ;

Toscano, PJ ;

Welch, JT .

JOURNAL OF ORGANOMETALLIC CHEMISTRY, 2003, 678 (1-2) :15-32

[3] Conformal copper deposition in deep trenches [J].

Bollmann, D ;

Merkel, R ;

Klumpp, A .

MICROELECTRONIC ENGINEERING, 1997, 37-8 (1-4) :105-110

[4]

BRADLEY AZ, 2004, Patent No. 2004094689

[5]

BRADLEY AZ, Patent No. 69639578

[6]

BRADLEY AZ, 2006, Patent No. 2006015225

[7] BONDING IN THE GROUND-STATE AND EXCITED-STATES OF COPPER ALKENE COMPLEXES [J].

BUDZELAAR, PHM ;

TIMMERMANS, PJJA ;

MACKOR, A ;

BAERENDS, EJ .

JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1987, 331 (03) :397-407

[8] OLEFIN CO-ORDINATION COMPOUNDS .3. INFRA-RED SPECTRA AND STRUCTURE - ATTEMPTED PREPARATION OF ACETYLENE COMPLEXES [J].

CHATT, J ;

DUNCANSON, LA .

JOURNAL OF THE CHEMICAL SOCIETY, 1953, (OCT) :2939-2947

[9] Observation of specific intermolecular interactions in the X-ray crystal structure of Cu(I) (1,1,1,3,5,5,5-hepta-fluoropentane-2,4-dionato) (vinyltrimethylsilane) [J].

Chen, TY ;

Omnès, L ;

Vaisserman, J ;

Doppelt, P .

INORGANICA CHIMICA ACTA, 2004, 357 (04) :1299-1302

[10] STRUCTURAL EFFECTS CONTROLLING THE RATE OF THE RETRO-DIELS-ALDER REACTION IN ANTHRACENE CYCLOADDUCTS [J].

CHUNG, YS ;

DUERR, BF ;

MCKELVEY, TA ;

NANJAPPAN, P ;

CZARNIK, AW .

JOURNAL OF ORGANIC CHEMISTRY, 1989, 54 (05) :1018-1032

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