High sensitive and linear pressure sensor for ultra-low pressure measurement

被引：8

作者：

Huang, Xian ^{[1
,2
]}

Zhang, Dacheng ^{[2
]}

机构：

[1] Peking Univ, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China

[2] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China

来源：

28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷

关键词：

Pressure sensor; high sensitive and linear; ultra-low pressure; peninsula-structured diaphragm; finite element method;

D O I：

10.1016/j.proeng.2014.11.383

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel peninsula-structured diaphragm with specially designed piezoresistors was proposed in our present pressure sensor for ultra-low pressure measurement. Finite element method (FEM) was adopted for analyzing the sensor performance. In comparison to typical sensors with flat and center-bossed diaphragms, the optimized sensor design could achieve excellent sensitivity and linearity. In accordance with the FEM results, the fabricated pressure sensor showed a sensitivity of 18.4mV/V full-scale output and a nonlinearity error of 0.36% FSS in the pressure range 0-5kPa. The proposed sensor structure is potentially a better choice for measuring low pressures. (C) 2014 The Authors. Published by Elsevier Ltd.

引用

页码：1202 / 1205

页数：4

共 50 条

[41] Simulation of carbon nanotubes polymer based piezoresistive flexible pressure sensor for ultra sensitive electronic skin [J].

Hegde, Roopa ;

Ramji, K. ;

Swapna, P. .

2018 2ND INTERNATIONAL CONFERENCE ON ELECTRONICS, MATERIALS ENGINEERING & NANO-TECHNOLOGY (IEMENTECH), 2018, :342-346

[42] High-pressure silicon sensor with low-cost packaging [J].

Birkelund, K ;

Gravesen, P ;

Shiryaev, S ;

Rasmussen, PB ;

Rasmussen, MD .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 92 (1-3) :16-22

[43] Self-powered pressure sensor for ultra-wide range pressure detection [J].

Kaushik Parida ;

Venkateswarlu Bhavanasi ;

Vipin Kumar ;

Ramaraju Bendi ;

Pooi See Lee .

Nano Research, 2017, 10 :3557-3570

[44] Self-powered pressure sensor for ultra-wide range pressure detection [J].

Parida, Kaushik ;

Bhavanasi, Venkateswarlu ;

Kumar, Vipin ;

Bendi, Ramaraju ;

Lee, Pooi See .

NANO RESEARCH, 2017, 10 (10) :3557-3570

[45] Microfabricated implantable pressure sensor for flow measurement [J].

Liu, Sheng ;

Farrow, Reginald ;

Zunino, James L., III ;

Lim, Hee C. ;

Federici, John ;

Thomas, Gordon .

RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VII, 2008, 6884

[46] Nano-Mirror Surface Generation for Hardened Steel Using Ultra-Low Pressure Super-Finishing [J].

Ogawa, Sachiko ;

Aoyama, Eiichi ;

Hirogaki, Toshiki ;

Onchi, Yoshiaki ;

Oku, Kentarou .

International Journal of Automation Technology, 2009, 3 (04) :433-444

[47] A Thin Film Pressure Sensor with Double Sensitive Units [J].

Pan, Hongqing ;

Hu, Guangyu ;

Cao, Pingguo ;

Wang, Yubing ;

Ge, Yunjian ;

Shuang, Feng .

2015 IEEE INTERNATIONAL CONFERENCE ON INFORMATION AND AUTOMATION, 2015, :2947-2948

[48] Aneurysm sac pressure measurement with a pressure sensor in endovascular aortic aneurysm repair [J].

Carnero, Lisandro ;

Milner, Ross .

VASCULAR, 2006, 14 (05) :264-269

[49] A high sensitivity resonator pressure sensor [J].

Yang, JS ;

Zhang, X .

SENSORS AND ACTUATORS A-PHYSICAL, 2002, 101 (03) :332-337

[50] Conception and realization of a novel design for a capacitive pressure sensor with high sensitivity and linear response [J].

Achouch, Samia ;

Bousseta, Rihab ;

Regragui, Fakhita ;

Gharbi, Mourad .

RESULTS IN ENGINEERING, 2022, 15

← 1 2 3 4 5 →