High sensitive and linear pressure sensor for ultra-low pressure measurement

被引：8

作者：

Huang, Xian ^{[1
,2
]}

Zhang, Dacheng ^{[2
]}

机构：

[1] Peking Univ, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China

[2] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China

来源：

28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷

关键词：

Pressure sensor; high sensitive and linear; ultra-low pressure; peninsula-structured diaphragm; finite element method;

D O I：

10.1016/j.proeng.2014.11.383

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel peninsula-structured diaphragm with specially designed piezoresistors was proposed in our present pressure sensor for ultra-low pressure measurement. Finite element method (FEM) was adopted for analyzing the sensor performance. In comparison to typical sensors with flat and center-bossed diaphragms, the optimized sensor design could achieve excellent sensitivity and linearity. In accordance with the FEM results, the fabricated pressure sensor showed a sensitivity of 18.4mV/V full-scale output and a nonlinearity error of 0.36% FSS in the pressure range 0-5kPa. The proposed sensor structure is potentially a better choice for measuring low pressures. (C) 2014 The Authors. Published by Elsevier Ltd.

引用

页码：1202 / 1205

页数：4

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