Vibrational and emission properties of porous 6H-SiC

被引：8
|
作者：
Rossi, AM
Ballarini, V
Ferrero, S
Giorgis, F
机构：
[1] INFM, Nanotechnol & Microsyst Dept, IEN Galileo Ferraris, Turin, Italy
[2] Politecn Torino, Dept Phys, INFM, Turin, Italy
[3] Mat & Microsyst Lab, Chivasso, Torino, Italy
来源：
SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2 | 2004年 / 457-460卷
关键词：
porous SiC; Raman spectroscopy; FTIR spectroscopy; photoluminescence;
D O I：
10.4028/www.scientific.net/MSF.457-460.1475
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report on optical spectroscopies performed on porous SiC obtained by electrochemical etching of 6H-SiC wafers. Strong modification of Raman and Infrared spectra are ascribable to surface states peculiar of the porous structure. The emission properties of the etched specimens are analyzed by stationary Photoluminescence spectra and show marked differences with respect to the bulk non-porous samples.
引用
收藏
页码：1475 / 1478
页数：4
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