An optically resonant position read-out system for MEMS gas sensors

被引：1

作者：

Putrino, Gino ^{[1
]}

Keating, Adrian ^{[1
]}

Martyniuk, Mariusz ^{[1
]}

Faraone, Lorenzo ^{[1
]}

Dell, John M. ^{[1
]}

机构：

[1] Univ Western Australia, Sch Elect Elect & Comp Engn, M018,35 Stirling Hwy, Crawley, WA 6009, Australia

来源：

MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS VI | 2014年 / 9083卷

基金：

澳大利亚研究理事会;

关键词：

MEMS; MOEMS; sensors; diffraction gratings; optical cavities; SURFACE STRESS; FREQUENCY;

D O I：

10.1117/12.2053135

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present an experimental demonstration of a novel, integrated readout approach for measuring the suspended height of micro-electro-mechanical systems (MEMS) structures. The approach is based on creating a resonant optical cavity between the suspended MEMS structure and the substrate that the MEMS structure is anchored to. The resulting interferometric effect causes modulation of an optical laser signal which is strongly dependent on the position of the MEMS device.

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页数：7

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