To overcome the difficulty that the operating pressure range of usual mass-spectrometers does not meet the pressure ranges of gas lasers,the authors have improved the M. S technique by the following four procedures: (1)Making an ultramini-flow valve which can sample the laser mixture and take mass-spectrum only by a little amount of gases; (2)Creating a high pressure ultramini-flow valve possessing pressure-linearity up to 1000 x 133 Pa, especially suitable to M S analysis of TEA CO2 lassers; (3)Investigating the time-delay and giving an evaluate method to correct them; (4) Proposing a method, the sample gas bottle method, to overcome the sensitivity-fluctuation of the M S tube through comparison.