Effects of CPII implantation on the characteristics of diamond-like carbon films

被引：7

作者：

Chen, Ya-Chi ^{[2
]}

Weng, Ko-Wei ^{[1
]}

Chao, Ching-Hsun ^{[1
]}

Lien, Shui-Yang ^{[1
]}

Han, Sheng ^{[3
]}

Chen, Tien-Lai ^{[4
]}

Lee, Ying-Chieh ^{[5
]}

Shih, Han-Chang ^{[2
]}

Wang, Da-Yung ^{[1
]}

机构：

[1] MingDao Univ, Dept Mat Sci & Engn, Changhua 523, Taiwan

[2] Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 402, Taiwan

[3] Natl Taichung Inst Technol, Dept Leisure & Recreat Management, Taichung 404, Taiwan

[4] MingDao Univ, Dept Holist Wellness, Changhua 523, Taiwan

[5] Nationla Pingtung Univ Sci & Technol, Dept Mat Engn, Nei Pu 91201, Pingtung, Taiwan

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 16期

关键词：

Diamond-like carbon (DLC); Filter arc deposition (FAD); Surface properties; ION-IMPLANTATION;

D O I：

10.1016/j.apsusc.2009.03.067

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A diamond-like carbon film (DLC) was successfully synthesized using a hybrid PVD process, involving a filter arc deposition source (FAD) and a carbon plasma ion implanter (CPII). A quarter-torus plasma duct filter markedly reduced the density of the macro-particles. Graphite targets were used in FAD. Large electron and ion energies generated from the plasma duct facilitate the activation of carbon plasma and the deposition of high-quality DLC films. M2 tool steel was pre-implanted with 45 kV carbon ions before the DLC was deposited to enhance the adhesive and surface properties of the film. The ion mixing effect, the induction of residual stress and the phase transformation at the interface were significantly improved. The hardness of the DLC increased to 47.7 GPa and 56.5 GPa, and the wear life was prolonged to over 70 km with implantation fluences of 1 x 1017 ions/cm(2) and 2 x 10(17) ions/cm(2), respectively. (C) 2009 Elsevier B. V. All rights reserved.

引用

页码：7216 / 7220

页数：5

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