Analysis of a MEMS vibration detector

被引：0
|
作者：
Gupta, A [1 ]
Mukherjee, S [1 ]
Jain, VK [1 ]
Gupta, A [1 ]
机构：
[1] Indian Inst Technol, Dept Mech Engn, New Delhi 110016, India
来源：
INDO-RUSSIAN WORKSHOP ON MICROMECHANICAL SYSTEMS | 1999年 / 3903卷
关键词：
MEMS; vibration detector; FEM; sensor;
D O I：
10.1117/12.369478
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A MEMS vibration detector fabricated at the Solid State Physics Laboratory, Delhi, has been analysed for its mechanical response. The sensor consists of a central plate mounted on webs. Change of capacitance between the central plate and the base is used to measure the vibration. This paper describes analysis of the mechanical characteristics of the device.
引用
收藏
页码：84 / 86
页数：3
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