Surface microanalysis with slow electrons

被引：0
|
作者：
Bauer, Ernst G. [1 ]
机构：
[1] Arizona State Univ, Dept Phys & Astron, Tempe, AZ 85287 USA
来源：
MICROSCOPY AND MICROANALYSIS | 2006年 / 12卷 / 04期
关键词：
XPEEM; XPS; XPD; LEEM; LEED;
D O I：
10.1017/S1431927606060387
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Microanalysis on the 10-nm level using imaging, diffraction, and spectroscopy of slow photo-emitted and reflected electrons is discussed. The instrumentation that uses a cathode lens is briefly reviewed, and a number of applications illustrate the power of this microanalysis method.
引用
收藏
页码：347 / 351
页数：5
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