Surface microanalysis with slow electrons

被引：0

作者：

Bauer, Ernst G. ^{[1
]}

机构：

[1] Arizona State Univ, Dept Phys & Astron, Tempe, AZ 85287 USA

来源：

MICROSCOPY AND MICROANALYSIS | 2006年 / 12卷 / 04期

关键词：

XPEEM; XPS; XPD; LEEM; LEED;

D O I：

10.1017/S1431927606060387

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Microanalysis on the 10-nm level using imaging, diffraction, and spectroscopy of slow photo-emitted and reflected electrons is discussed. The instrumentation that uses a cathode lens is briefly reviewed, and a number of applications illustrate the power of this microanalysis method.

引用

页码：347 / 351

页数：5

共 50 条

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