A novel thick film conductive type CO2 sensor

被引:63
作者
Haeusler, A
Meyer, JU
机构
[1] Fraunhofer Inst. for Biomed. Eng., D-66386 St. Ingbert
[2] Fraunhofer Inst. for Bio-Med. Eng., St. Ingbert
[3] Max Planck Institute, Bad Nauheim
[4] Pharmacia Experimental Medicine, San Diego, CA
[5] NASA-Ames Research Center, Moffett Field, CA
[6] Sensor- Syst./Microsystems Dept., Fraunhofer Inst. for Biomed. Eng., St. Ingbert
关键词
carbon dioxide; thick film; conductive type sensor; metal oxides; effects of additives;
D O I
10.1016/S0925-4005(96)01847-3
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A low-cost CO2 sensor in thick film technology has been developed using BaTiO3 and various semiconducting oxides. The sensing principle of this new CO2 sensor is based on changes in conductance of the metal oxides in the presence of carbon dioxide. In this report, effects of preparation parameters and effects of various additives on the sensitivity of the CO2 sensor are described, and measurements of the sensor resistance as a function of CO2 concentration are presented. The sensor is applicable over a wide range of CO2 concentrations. Humidity changes have only minor effects on the sensor response.
引用
收藏
页码:388 / 395
页数:8
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