Alignment and stacking of semiconductor photonic bandgaps by wafer-fusion

被引:81
作者
Noda, S [1 ]
Yamamoto, N [1 ]
Imada, M [1 ]
Kobayashi, H [1 ]
Okano, M [1 ]
机构
[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6068501, Japan
关键词
photonic bandgap; photonic crystal; photonic integrated circuit; semiconductor laser; wafer-bending; wafer-fusion;
D O I
10.1109/50.802979
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Semiconductor-based three-dimensional (3-D) photonic crystals are developed by utilizing a wafer fusion and alignment technique. A clear and considerable bandgap effect is successfully demonstrated in infrared to near-infrared wavelengths. It is pointed out that the introduction of arbitrary defect states and/or efficient light emitters can be possible in this method. For the example of the introduction of a light-emitting element, a surface-emitting laser with a two-dimensional (2-D) photonic crystal structure is fabricated, and very unique lasing characteristics are demonstrated. These results encourage us very much for the development of various quantum optical devices and circuits including not only passive, but also active devices.
引用
收藏
页码:1948 / 1955
页数:8
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