Ni-based composite microstructures fabricated by femtosecond laser reductive sintering of NiO/Cr mixed nanoparticles

被引:12
作者
Tamura, Kenki [1 ]
Mizoshiri, Mizue [1 ]
Sakurai, Junpei [1 ]
Hata, Seiichi [1 ]
机构
[1] Nagoya Univ, Grad Sch Engn, Dept Micronano Syst Engn, Nagoya, Aichi 4648603, Japan
关键词
MASKLESS FABRICATION; METAL; POWDER; INK; ELECTRODE; ALLOYS; LAYERS; PARTS; TOP;
D O I
10.7567/JJAP.56.06GN08
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ni-based composite micropatterns were fabricated by the femtosecond laser reductive sintering of NiO/Cr mixed nanoparticles. A NiO/Cr mixed nanoparticle solution including ethylene glycol and polyvinylpyrrolidone was irradiated with focused femtosecond laser pulses. The X-ray diffraction spectra of the fabricated micropatterns indicated that NiO nanoparticles were well reduced under atmospheric conditions in the laser scanning speed range of 5-15mm/s. In contrast, micropatterns including NiO were formed at a laser scanning speed of 1mm/s, indicating that the reduced Ni was reoxidized by overheating. These results were supported by those of energy-dispersive X-ray spectrometry analysis and the electrical resistivity of the micropatterns. The compositions such as Ni, NiO, Cr2O3, and Ni-Cr in the fabricated micropatterns depended on laser scanning speed. The selective fabrication of a ferromagnetic free microgear from the substrate and an axis fixed on the substrate was demonstrated by controlling the laser scanning speed. The fabrication process for Ni-based composite microstructures is useful for the fabrication of ferromagnetic microdevices. (C) 2017 The Japan Society of Applied Physics
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页数:5
相关论文
共 35 条
[1]   Electrical resistivity measurements in Ni-Cr alloys [J].
Al-Aql, AA .
MATERIALS & DESIGN, 2003, 24 (07) :547-550
[2]   Selective Sintering of Metal Nanoparticle Ink for Maskless Fabrication of an Electrode Micropattern Using a Spatially Modulated Laser Beam by a Digital Micromirror Device [J].
An, Kunsik ;
Hong, Sukjoon ;
Han, Seungyong ;
Lee, Hyungman ;
Yeo, Junyeob ;
Ko, Seung Hwan .
ACS APPLIED MATERIALS & INTERFACES, 2014, 6 (04) :2786-2790
[3]   Direct patterning of Cu microstructures using femtosecond laser-induced CuO nanoparticle reduction [J].
Arakane, Shun ;
Mizoshiri, Mizue ;
Hata, Seiichi .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (06)
[4]   Thermal modeling of laser sintering of two-component metal powder on top of sintered layers via multi-line scanning [J].
Chen, Tiebing ;
Zhang, Yuwen .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2007, 86 (02) :213-220
[5]  
Chichkov BN, 1996, APPL PHYS A-MATER, V63, P109, DOI 10.1007/BF01567637
[6]   Rapid manufacturing of metal components by laser forming [J].
Costa Santos, Edson ;
Shiomi, Masanari ;
Osakada, Kozo ;
Laoui, Tahar .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2006, 46 (12-13) :1459-1468
[7]  
Ellingham H J T., 1944, J SOC CHEM IND LOND, V63, P125, DOI [10.1002/jctb.5000630501, DOI 10.1002/JCTB.5000630501]
[8]   When Size Really Matters: Size-Dependent Properties and Surface Chemistry of Metal and Metal Oxide Nanoparticles in Gas and Liquid Phase Environments [J].
Grassian, Vicki H. .
JOURNAL OF PHYSICAL CHEMISTRY C, 2008, 112 (47) :18303-18313
[9]   In vitro biocompatibility of CoCrMo dental alloys fabricated by selective laser melting [J].
Hedberg, Yolanda S. ;
Qian, Bin ;
Shen, Zhijian ;
Virtanen, Sannakaisa ;
Wallinder, Inger Odnevall .
DENTAL MATERIALS, 2014, 30 (05) :525-534
[10]   Nonvacuum, Maskless Fabrication of a Flexible Metal Grid Transparent Conductor by Low-Temperature Selective Laser Sintering of Nanoparticle Ink [J].
Hong, Sukjoon ;
Yeo, Junyeob ;
Kim, Gunho ;
Kim, Dongkyu ;
Lee, Habeom ;
Kwon, Jinhyeong ;
Lee, Hyungman ;
Lee, Phillip ;
Ko, Seung Hwan .
ACS NANO, 2013, 7 (06) :5024-5031