Thin Al2O3 passivated boron emitter of n-type bifacial c-Si solar cells with industrial process

被引:23
作者
Lu, Guilin [1 ,2 ]
Zheng, Fei [3 ]
Wang, Jianqiang [3 ]
Shen, Wenzhong [1 ,2 ,4 ]
机构
[1] Shanghai Jiao Tong Univ, Inst Solar Energy, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Dept Phys & Astron, Key Lab Artificial Struct & Quantum Control, Minist Educ, Shanghai 200240, Peoples R China
[3] Shanghai Shenzhou New Energy Dev Co Ltd, Shanghai 201112, Peoples R China
[4] Collaborat Innovat Ctr Adv Microstruct, Nanjing 210093, Jiangsu, Peoples R China
来源
PROGRESS IN PHOTOVOLTAICS | 2017年 / 25卷 / 04期
关键词
c-Si solar cells; n-type bifacial; thin Al2O3; industrial process; SURFACE PASSIVATION; P-TYPE; SILICON; ALD; TEMPERATURE; DEPOSITION;
D O I
10.1002/pip.2859
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
We have presented thin Al2O3 (similar to 4nm) with SiNx:H capped (similar to 75nm) films to effectively passivate the boron-doped p(+) emitter surfaces of the n-type bifacial c-Si solar cells with BBr3 diffusion emitter and phosphorus ion-implanted back surface field. The thin Al2O3 capped with SiNx:H structure not only possesses the excellent field effect and chemical passivation, but also establishes a simple cell structure fully compatible with the existing production lines and processes for the low-cost n-type bifacial c-Si solar cell industrialization. We have successfully achieved the large area (238.95cm(2)) high efficiency of 20.89% (front) and 18.45% (rear) n-type bifacial c-Si solar cells by optimizing the peak sintering temperature and fine finger double printing technology. We have further shown that the conversion efficiency of the n-type bifacial c-Si solar cells can be improved to be over 21.3% by taking a reasonable high emitter sheet resistance. Copyright (c) 2017 John Wiley & Sons, Ltd.
引用
收藏
页码:280 / 290
页数:11
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