Characteristics of Undoped and Mn-Doped BiFeO3 Films Formed on Pt and SrRuO3/Pt Electrodes by Radio-Frequency Sputtering

被引:24
|
作者
Kim, Jeong Hwan [1 ]
Funakubo, Hiroshi [1 ]
Sugiyama, Yoshihiro [1 ,2 ]
Ishiwara, Hiroshi [1 ]
机构
[1] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Midori Ku, Yokohama, Kanagawa 2268502, Japan
[2] Fujitsu Labs Ltd, Kanagawa 2430197, Japan
关键词
THIN-FILMS; FERROELECTRIC PROPERTIES; ROOM-TEMPERATURE; LEAKAGE CURRENT; POLARIZATION;
D O I
10.1143/JJAP.48.09KB02
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pure BiFeO3 (BFO) and Mn-doped BiFeO3 (BFMO) films were deposited at 550 degrees C on Pt(111) and SrRuO3(SRO)/Pt(111) bottom electrodes using radio-frequency (RF) sputtering. Mn doping of 5 at. % into BFO films was effective in reducing leakage current density at a high electric field. In polarization versus electric field (P-E) measurement at 100 kHz, square hysteresis loops were obtained at room temperature in both BFO and BFMO films on Pt and SRO/Pt electrodes. In the BFMO films, the frequency dependence of the remanent polarization was not pronounced, even when the measurement frequency was decreased to 5 kHz. In the BFO film, on the other hand, no accurate hysteresis loops could be measured at a frequency below 10 kHz, because of the large leakage current. (C) 2009 The Japan Society of Applied Physics
引用
收藏
页码:09KB021 / 09KB024
页数:4
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