Modelling of processes accompanying implantation treatment of metals

被引:0
作者
Lyapin, AI [1 ]
机构
[1] Mogilev Mech Engn Inst, Mogilev 212005, BELARUS
关键词
D O I
10.1088/0965-0393/8/2/307
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The model describing the dynamics of the ion-stimulated processes in the implanted layer is under consideration. The model is a system of non-linear differential equations. This equation system is obtained on the basis of synergetic approaches. The parameters included in the system of equations are connected with the irradiation parameters (energy, ion projective run, intensity, dose and temperature) and the characteristics of the irradiated material (structure, energy of atom binding and displacement, and diffusion coefficient). The boundary conditions of the model are connected with experimental data. Model calculations lead to physically motivated results. The model under consideration enables a calculation to be made of the ratio between various phases in the implanted layer under chosen irradiation conditions. The results of our model calculations may be used for planning physical experiments or, on the other hand, for the interpretation of experimental observations.
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页码:169 / 179
页数:11
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