Determination of film thickness and refractive index by interferometry

被引:24
作者
Shabana, HM [1 ]
机构
[1] Mansoura Univ, Fac Sci, Dept Phys, Mansoura 35516, Egypt
关键词
interferometry; refractive index; two-beam pluta microscope; Michelson interferometer; polypropylene film;
D O I
10.1016/j.polymertesting.2004.01.006
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The interference fringes formed in an air wedge and those based on the theory of two-beam interference such as the Pluta microscope and Michelson interferometer are utilized for estimating the thickness and/or refractive index of transparent polypropylene thin films. The theories of the methods are presented, and their applications to measurement of film thickness and refractive index are given. The accuracy of the measured film thickness and refractive index is calculated. The three interference methods proved that they could be transformed into valuable technological tools. The study established that, estimation of the thickness of thin films by the air wedge interference method is more simple and more accurate than the others. Films not more than 50 mum thickness are recommended in the Pluta interference microscope. (C) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码:695 / 702
页数:8
相关论文
共 50 条
[21]   Simultaneous measurement of the refractive index, thickness and position of suspended thin film [J].
Lai, Cheng-Chung ;
Cheng, Chi-Hsiang ;
Chiu, Wei-Chao ;
Hsu, I-Jen .
PHOTONICS NORTH 2006, PTS 1 AND 2, 2006, 6343
[22]   Reliable determination of wavelength dependence of thin film refractive index [J].
Tikhonravov, A ;
Trubetskov, M ;
Amotchkina, T ;
Tikhonravov, A ;
Ristau, D ;
Günster, S .
ADVANCED CHARACTERIZATION TECHNIQUES FOR OPTICS, SEMICONDUCTORS, AND NANOTECHNOLOGIES, 2003, 5188 :331-342
[23]   IR Spectroscopic Determination of the Refractive Index and Thickness of Hydrogenated Silicon Layers [J].
Timoshenkov, S. P. ;
Pelipas, V. P. ;
Simonov, B. M. ;
Britkov, O. M. ;
Kalugin, V. V. .
INORGANIC MATERIALS, 2011, 47 (06) :575-578
[24]   Determination of the refractive index and the thickness of double side coated thin films [J].
Ozharar, S. ;
Akcan, D. ;
Arda, L. .
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2016, 18 (1-2) :65-69
[25]   IR spectroscopic determination of the refractive index and thickness of hydrogenated silicon layers [J].
S. P. Timoshenkov ;
V. P. Pelipas ;
B. M. Simonov ;
O. M. Britkov ;
V. V. Kalugin .
Inorganic Materials, 2011, 47 :575-578
[26]   Refractive index measurement using comparative interferometry [J].
Bojan, Mihaela ;
Apostol, D. ;
Damian, V. ;
Logofatu, P. C. ;
Garoi, F. ;
Iordache, Iuliana .
ADVANCED TOPICS IN OPTOELECTRONICS, MICROELECTRONICS, AND NANOTECHNOLOGIES III, 2007, 6635
[27]   Measurement of the refractive index and thickness for lens by confocal technique [J].
Wang, Yun ;
Qiu, Lirong ;
Yang, Jiamiao ;
Zhao, Weiqian .
OPTIK, 2013, 124 (17) :2825-2828
[28]   Dispersive interferometry using femtosecond pulse laser for measuring refractive index and physical thickness of test samples [J].
Joo, Ki-Nam ;
Kim, Seung-Woo .
INTERFEROMETRY XIII: TECHNIQUES AND ANALYSIS, 2006, 6292
[29]   Nondestructive measurement of refractive index and thickness of spectacle lens based on the low-coherence interferometry system [J].
Pu, Yinsen ;
Deng, Zhichao ;
Duan, Liangcheng ;
Mei, Jianchun ;
Wang, Jin ;
Hu, Zhixiong ;
Ye, Qing .
OPTICAL ENGINEERING, 2025, 64 (05)
[30]   A refractive index interferometry method based on the X-ray crystallography [J].
Wu, Jie ;
Chen, Jiabi .
OPTIK, 2014, 125 (16) :4526-4528