A microchip laser feedback interferometer with nanometer resolution and increased measurement speed based on phase meter

被引：9

作者：

Zhang, Song ^{[1
]}

Tan, Yidong ^{[1
]}

Ren, Zhou ^{[1
]}

Zhang, Yongqin ^{[2
]}

Zhang, Shulian ^{[1
]}

机构：

[1] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instruments & Mechanol, Beijing 100084, Peoples R China

[2] Nantong Univ, Sch Mech Engn, Nantong 226019, Jiangsu, Peoples R China

来源：

APPLIED PHYSICS B-LASERS AND OPTICS | 2014年 / 116卷 / 03期

关键词：

SOLID-STATE LASER; SHIFTED OPTICAL FEEDBACK; MICROSCOPY; METROLOGY; CELLS;

D O I：

10.1007/s00340-013-5743-4

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We introduce a new signal processing method based on phase meter into heterodyne microchip Nd:YAG laser feedback interferometer. The nanometer resolution and a higher measurement speed are realized. The factors determining the accuracy are analyzed. The displacements of the Physik Instrumente nanopositioning system and two piezoelectric transducers were measured. Experimental results indicate laser feedback interferometer's ability of measuring nanoscale displacement and present promising application prospects in noncooperative targets measurement.

引用

页码：609 / 616

页数：8

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