Long Range, High accuracy Absolute Distance Measurement by Improved Three-Wavelength Heterodyne Interferometry

被引:0
|
作者
Huang, Pei-Chi [1 ]
Yang, Shang-Da [1 ]
机构
[1] Natl Tsing Hua Univ, Inst Photon Technol, Hsinchu 30013, Taiwan
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The complexity and non-ambiguity range (NAR) of the conventional three-wavelength heterodyne interferometry are improved by using one phase modulator and a mapping procedure, respectively. Experiments demonstrated 10-mm NAR and an estimated accuracy of 0.65 nm.
引用
收藏
页数:2
相关论文
共 50 条
  • [11] A Measurement System for Surface Topography Based on Three-Wavelength Interferometry
    Yang Liangen
    Liu Chuang
    Wang Xuanze
    He Tao
    Zhai Zhongsheng
    2017 INTERNATIONAL CONFERENCE ON MECHANICAL, SYSTEM AND CONTROL ENGINEERING (ICMSC), 2017, : 272 - 277
  • [12] Multiple-wavelength interferometry for absolute distance measurement and three-dimensional imaging
    Trautner, J
    Walcher, K
    Leuchs, G
    Bodermann, B
    Telle, HR
    TECHNISCHES MESSEN, 2000, 67 (10): : 406 - 409
  • [13] Absolute Distance Measurement by Self-Heterodyne EO Comb Interferometry
    Xue, Bin
    Wang, Zhiyang
    Zhang, Haoyun
    Zhang, Kai
    Chen, Yang
    He, Mingzhao
    Lin, Baike
    Wu, Hanzhong
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 30 (09) : 861 - 864
  • [14] Signal analysis of wavelength scanning interferometry for absolute distance measurement
    Wang, Yong
    Liao, Yanbiao
    Tian, Qian
    Guangxue Xuebao/Acta Optica Sinica, 1999, 19 (04): : 544 - 551
  • [15] Synthetic wavelength interferometry of an optical frequency comb for absolute distance measurement
    Wu, Guanhao
    Liao, Lei
    Xiong, Shilin
    Li, Guoyuan
    Cai, Zhijian
    Zhu, Zebin
    SCIENTIFIC REPORTS, 2018, 8
  • [16] Many-Wavelength Interferometry with Thousands of Lasers for Absolute Distance Measurement
    van den Berg, S. A.
    Persijn, S. T.
    Kok, G. J. P.
    Zeitouny, M. G.
    Bhattacharya, N.
    PHYSICAL REVIEW LETTERS, 2012, 108 (18)
  • [17] Absolute distance interferometry with two-wavelength fringe visibility measurement
    Golubev, AN
    Chekhovsky, AM
    OPTICAL ENGINEERING, 1997, 36 (08) : 2229 - 2232
  • [18] Synthetic wavelength interferometry of an optical frequency comb for absolute distance measurement
    Guanhao Wu
    Lei Liao
    Shilin Xiong
    Guoyuan Li
    Zhijian Cai
    Zebin Zhu
    Scientific Reports, 8
  • [19] Surface and thickness profile measurement of a transparent film by three-wavelength vertical scanning interferometry
    Kitagawa, Katsuichi
    OPTICS LETTERS, 2014, 39 (14) : 4172 - 4175
  • [20] Three-wavelength parallel optical fiber dispersion measurement using dual-heterodyne mixing
    Shioda, Tatsutoshi
    Shimizu, Naoya
    Nakamura, Masaichi
    Applied Optics, 2012, 51 (27): : 6586 - 6593