Design and Analysis of Displacement Measurement System Based on the Four-Quadrant Detector

被引:4
|
作者
Gao Zi-jun [1 ]
Dong Li-li [1 ]
Xu Wen-hai [1 ]
机构
[1] Dalian Maritime Univ, Coll Informat Sci Technol, Dalian 116026, Peoples R China
来源
INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2013: LASER SENSING AND IMAGING AND APPLICATIONS | 2013年 / 8905卷
关键词
Four-quadrant detector; displacement measurement; system design;
D O I
10.1117/12.2040172
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The four-quadrant detector is mainly used in high-precision displacement measurement and other related fields. With the emergence of displacement problem in a large number of projects, the displacement measurement accuracy, speed and reliability have become increasingly demanding. In this paper, the measurement principle of four-quadrant detector is analyzed theoretically, the displacement measurement system based on four-quadrant detector is designed, and the experimental platform is built to test and validate the stability, measurement accuracy and range of the displacement measurement system. Experimental results show that: the deviation of the same spot position on measurement system is less than 0.17 mu m. The measurement error of spot displacement is less than 3.7 mu m.
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页数:8
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