[1] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Heilongjiang, Peoples R China
[2] Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, D-01328 Dresden, Germany
[3] Harbin Inst Technol, Res Ctr Basic Space Sci, Harbin 150001, Heilongjiang, Peoples R China
[4] Chinses Acad Sci, Inst Microelect, Beijing 100029, Peoples R China