Pulsed laser deposition of PLZT films: structural and optical characterization

被引：42
作者：
Gaidi, M
Amassian, A
Chaker, M
Kulishov, M
Martinu, L
机构：
[1] INRS Energie, Varennes, PQ J3X 1S2, Canada
[2] Ecole Polytech, Dept Genie Phys, Montreal, PQ H3C 3A7, Canada
[3] Adtek Photomask Inc, Montreal, PQ H4T 1J6, Canada
来源：
APPLIED SURFACE SCIENCE | 2004年 / 226卷 / 04期
关键词：
PLZT (9/65/35); PLD; XRD; surface morphology; electro-optic;
D O I：
10.1016/j.apsusc.2003.10.037
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Transparent lanthanum-modified lead zirconate titanate (PLZT) thin films with electro-optic properties were deposited on indium-doped tin oxide (ITO) coated glass by pulsed laser deposition (PLD). Stoichiometric films with the crystallographic perovskite structure required for electro-optical behaviour, and a composition ratio close to 9/65/35 were obtained. The microstructural, optical and electro-optic properties of these films were studied for different substrate temperatures, T-s, and reactor oxygen pressure, P-O2 The films annealed at 700 degreesC in oxygen at atmospheric pressure are highly (I 10) perovskite orientated and free of the undesired pyrochlore phase. The optical constants (n and k as a function of wavelength) of the films were obtained using variable angle spectroscopic ellipsometry (VASE) and spectrophotometry in the UV-Vis-NIR regions. They appear to be strongly depending on the deposition conditions. A high quadratic electro-optic coefficient, close to that of the bulk value, was obtained at 632.8 nm by single-beam (ellipsometric) configuration. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：347 / 354
页数：8
相关论文
共 22 条
[1]   FERROELECTRIC (PB,LA)(ZR,TI)O3 EPITAXIAL THIN-FILMS ON SAPPHIRE GROWN BY RF-PLANAR MAGNETRON SPUTTERING [J].
ADACHI, H ;
MITSUYU, T ;
YAMAZAKI, O ;
WASA, K .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) :736-741
[2]   Measurement of the electro-optic coefficients:: description and comparison of the experimental techniques [J].
Aillerie, M ;
Théofanous, N ;
Fontana, MD .
APPLIED PHYSICS B-LASERS AND OPTICS, 2000, 70 (03) :317-334
[3]   Electrical and optical properties of PLZT thin films on ITO coated glass by sol-gel processing [J].
Choi, HW ;
Park, YS ;
Dougherty, J ;
Jang, NW ;
Park, CY .
JOURNAL OF MATERIALS SCIENCE, 2000, 35 (06) :1475-1479
[4]  
Chrisey D. B., 1994, PULSED LASER DEPOSIT
[5]   EPITAXIAL-GROWTH OF THIN-FILMS OF BATIO3 USING EXCIMER LASER ABLATION [J].
DAVIS, GM ;
GOWER, MC .
APPLIED PHYSICS LETTERS, 1989, 55 (02) :112-114
[6]   Pulsed laser deposition of highly conductive iridium oxide thin films [J].
ElKhakani, MA ;
Chaker, M ;
Gat, E .
APPLIED PHYSICS LETTERS, 1996, 69 (14) :2027-2029
[7]  
Guinier A., 1962, DUNOD, P462
[8]   PLZT ELECTROOPTIC MATERIALS AND APPLICATIONS - A REVIEW [J].
HAERTLING, GH .
FERROELECTRICS, 1987, 75 (1-2) :25-55
[9]  
HAERTLING GH, 1971, J AM CERAM SOC, V54, P1, DOI [10.1111/j.1151-2916.1971.tb12296.x, 10.1111/j.1151-2916.1970.tb12105.x-i1]
[10]   Interdigitated electrode-induced phase grating with an electrically switchable and tunable period [J].
Kulishov, M .
APPLIED OPTICS, 1999, 38 (36) :7356-7363
123