laser ablation technique;
maximum energy products;
Nd-Fe-B magnet;
remanence;
D O I:
10.1109/TMAG.2002.803230
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Nd-Fe-B film magnets were prepared by a laser ablation technique. The suppression of oxidation is a key point to obtain Nd-Fe-B film magnets with high coercivity. The following methods were used. 1) Ta substrates and a Ti sublimation pump as an auxiliary pump were used during deposition. 2) The composition of a target was set to Nd2.6Fe14B which included a larger amount of Nd compared with the stoichiometric composition of Nd2Fe14B. In addition, the distance between a target and a substrate was approximately 5 mm to ensure a high deposition rate. One-hour deposition using laser ablation technique enabled us to obtain Nd-Fe-B amorphous films with the thickness of approximately 50 mum. After annealing the films under an optimum condition, the coercivity and the remanence were more than 800 kA/m and approximately 0.6 T, respectively. In addition, the maximum energy product was 56 kJ/m(3).