Magnetic properties of Nd-Fe-B thick-film magnets prepared by laser ablation technique

被引:28
作者
Nakano, M [1 ]
Tsutsumi, S [1 ]
Fukunaga, H [1 ]
机构
[1] Nagasaki Univ, Dept Elect & Elect Engn, Nagasaki 8528521, Japan
关键词
laser ablation technique; maximum energy products; Nd-Fe-B magnet; remanence;
D O I
10.1109/TMAG.2002.803230
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nd-Fe-B film magnets were prepared by a laser ablation technique. The suppression of oxidation is a key point to obtain Nd-Fe-B film magnets with high coercivity. The following methods were used. 1) Ta substrates and a Ti sublimation pump as an auxiliary pump were used during deposition. 2) The composition of a target was set to Nd2.6Fe14B which included a larger amount of Nd compared with the stoichiometric composition of Nd2Fe14B. In addition, the distance between a target and a substrate was approximately 5 mm to ensure a high deposition rate. One-hour deposition using laser ablation technique enabled us to obtain Nd-Fe-B amorphous films with the thickness of approximately 50 mum. After annealing the films under an optimum condition, the coercivity and the remanence were more than 800 kA/m and approximately 0.6 T, respectively. In addition, the maximum energy product was 56 kJ/m(3).
引用
收藏
页码:2913 / 2915
页数:3
相关论文
共 3 条
  • [1] ARAKI T, 1997, P IEE JPN RES M MAG, V9770, P7
  • [2] Room temperature growth of crystalline Mn-Zn ferrite thin films by laser ablation technique
    Nakano, M
    Song, JM
    Fukunaga, H
    Matsuo, Y
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 2000, 36 (05) : 2927 - 2929
  • [3] ANISOTROPIC ND-FE-B THIN-FILM MAGNETS FOR MILLI-SIZE MOTOR
    YAMASHITA, S
    YAMASAKI, J
    IKEDA, M
    IWABUCHI, N
    [J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (10) : 6627 - 6629