Modeling and characterization of micromachined bi-directional electro-thermal vibromotors

被引：0

作者：

Shih, WP ^{[1
]}

Pai, M ^{[1
]}

Lin, YY ^{[1
]}

Hui, CY ^{[1
]}

Tien, NC ^{[1
]}

机构：

[1] Cornell Univ, Dept Theoret & Appl Mech, Ithaca, NY 14853 USA

来源：

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) - 2003 | 2003年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The motion of a micromachined bi-directional electrothermal vibromotor (BETV) is analyzed using an impact model which takes into account of friction and contact, as well as the compliance of the slider and the impact head. This model is shown to address several important issues on the reliable usage of BETV. These include (a) how to achieve the push or pull mode (b) avoiding multiple impacts in one actuation cycle (c) the existence of periodic solution with the same period as the thermal actuator. To test our theory, we fabricated and conducted experiments on several BETV with different geometries. Preliminary results showed good agreement between theory and experiments.

引用

页码：709 / 716

页数：8

共 12 条

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