Porous silicon based CO2 sensors with high sensitivity

被引：11
作者：
Kayahan, Ersin [1 ,2 ]
机构：
[1] Kocaeli Univ, Electroopt & Syst Engn Umuttepe, TR-41380 Kocaeli, Turkey
[2] Kocaeli Univ, Laser Technol Res & Applicat Ctr LATARUM, TR-41275 Yenikoy, Kocaeli, Turkey
来源：
OPTIK | 2018年 / 164卷
关键词：
Porous silicon; Photoluminescence; DC measurements; Carbon dioxide sensor; GAS SENSORS; ROOM-TEMPERATURE; HUMIDITY SENSOR; ORGANIC VAPORS; SURFACES; FILMS;
D O I：
10.1016/j.ijleo.2018.03.024
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Porous silicon (PS) has been an attractive material for bio-chemical sensors. Pore volume and surface area of the porous silicon are key parameters for the sensor applications. Its large surface area for the applications and compatibility with silicon-based technologies has been the driving force for this technology development. The carbon dioxide (CO2) gas is one of the most important greenhouse gases that cause global warming and air pollution. For this reason, detection of CO2 gas in living environment is essential. In this study, luminescence and electrical properties of the PS under different carbon dioxide levels and detection mechanisms were investigated. PS are fabricated by anodic etching in hydrofluoric acid based solution in a double anodization cell. The surface bond configurations and structural properties of PS were monitored by Fourier Transmission Infrared Spectroscopy (FTIR) and Scanning Electron Microscopy (SEM), respectively. The experimental results suggested that the PS surface very sensitive to CO2 gas and can be used for CO2 sensing. (C) 2018 Elsevier GmbH. All rights reserved.
引用
收藏
页码：271 / 276
页数：6
相关论文
共 21 条
  • [1] Temperature behavior of the APSFET - a porous silicon-based FET gas sensor
    Barillaro, G
    Nannini, A
    Pieri, F
    Strambini, LM
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2004, 100 (1-2) : 185 - 189
  • [2] Barillaro Giuseppe, 2014, HDB POROUS SILICON, P845
  • [3] Organometallic chemistry on silicon surfaces: formation of functional monolayers bound through Si-C bonds
    Buriak, JM
    [J]. CHEMICAL COMMUNICATIONS, 1999, (12) : 1051 - 1060
  • [4] Effect of TiO2 Functionalization on Nano-Porous Silicon for Selective Alcohol Sensing at Room Temperature
    Dwivedi, Priyanka
    Dhanekar, Saakshi
    Das, Samaresh
    Chandra, Sudhir
    [J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2017, 33 (06) : 516 - 522
  • [5] FTIR STUDIES OF H2O AND D2O DECOMPOSITION ON POROUS SILICON SURFACES
    GUPTA, P
    DILLON, AC
    BRACKER, AS
    GEORGE, SM
    [J]. SURFACE SCIENCE, 1991, 245 (03) : 360 - 372
  • [6] Determination of sensoric parameters of porous silicon in sensing of organic vapors
    Holec, T
    Chvojka, T
    Jelínek, I
    Jindrich, J
    Nemec, I
    Pelant, I
    Valenta, J
    Dian, J
    [J]. MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2002, 19 (1-2): : 251 - 254
  • [7] Porous Silicon Based Sensor for Organic Vapors
    Kayahan, E.
    Bahsi, Z. B.
    Oral, A. Y.
    Sezer, M.
    [J]. ACTA PHYSICA POLONICA A, 2015, 127 (04) : 1400 - 1402
  • [8] Porous Silicon Based Humidity Sensor
    Kayahan, E.
    [J]. ACTA PHYSICA POLONICA A, 2015, 127 (04) : 1397 - 1399
  • [9] The role of surface oxidation on luminescence degradation of porous silicon
    Kayahan, Ersin
    [J]. APPLIED SURFACE SCIENCE, 2011, 257 (09) : 4311 - 4316
  • [10] Extremely sensitive optical sensing of ethanol using porous silicon
    Min, HK
    Yang, HS
    Cho, SM
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2000, 67 (1-2) : 199 - 202
123