DESIGN AND FABRICATION OF FRESNEL LENSES

被引：8

作者：

Kusko, M. ^{[1
]}

Avram, A. ^{[1
]}

Apostol, D. ^{[2
]}

机构：

[1] Natl Inst Res & Dev Microtechnol, Bucharest, Romania

[2] Natl Inst Res & Dev Laser, Plasma & Radiat, Burchest, Romania

来源：

CAS: 2008 INTERNATIONAL SEMICONDUCTOR CONFERENCE, PROCEEDINGS | 2008年

关键词：

BPM simulation; Fresnel lens; RIE;

D O I：

10.1109/SMICND.2008.4703451

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper are presented the results on design, simulation and fabrication of Fresnel lenses. In the theoretical section the design concepts and BPM simulations results are presented, and in the experimental section details about controlled RIE etching process of various materials are provided Much attention is dedicated to find the etching rate corresponding to etching process parameters and substrate type.

引用

页码：445 / +

页数：2