Evaluation of the mechanical behaviour of nanometre-thick coatings deposited using an atmospheric pressure plasma system

被引:10
|
作者
Twomey, Barry [1 ]
Byrne, Gerry [1 ]
Hynes, Alan [2 ]
O'Neill, Liam [2 ]
Dowling, Denis [1 ]
机构
[1] UCD, Sch Elect Elect & Mech Engn, Dublin 4, Ireland
[2] Dow Corning Plasma Solut, Midleton, Cork, Ireland
关键词
Silicon oxide; Fragmentation test; Pin-on-disc; Atmospheric pressure plasma; Nano-coating; PECVD; BARRIER PROPERTIES; SCRATCH HARDNESS; FILMS; DISCHARGE; ADHESION; OXYGEN; TEMPERATURE; STABILITY; POLYMERS; EXPOSURE;
D O I
10.1016/j.surfcoat.2009.01.042
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This study evaluated the use of pin-on-disc wear testing as a technique to examine the mechanical behaviour of nanometre thick plasma deposited coatings. The coatings were deposited onto polyethylene terephthalate and silicon wafer substrates by directly injecting an aerosol of siloxane liquid precursors into a helium/oxygen atmospheric pressure plasma. The siloxane precursors examined were hexamethyldisiloxane, polydimethylsiloxane and tetramethyldisiloxane. The mechanical performance of 21 (+/- 3) nm thick coatings was compared using a pin-on-disc wear test technique and fragmentation tests. An increase in the level of precursor plasma exposure was found to be associated with an increase in coating surface energy and a reduction in coating roughness and resulted in enhanced wear resistance. Fragmentation tests revealed a transition from ductile failure to brittle failure as the level of plasma exposure increased. This correlated with the reduction in coating wear rates. Wear track depth and proximity to the coating/substrate interface were both found to influence the rate or wear. A simple correlation between wear rate and applied force is presented as a method for comparing coating performance using pin-on-disc wear testing. (c) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:2021 / 2029
页数:9
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