Micromachining of photonic devices by femtosecond laser pulses

被引:254
作者
Della Valle, G. [1 ]
Osellame, R. [1 ]
Laporta, P. [1 ]
机构
[1] CNR, Ist Foton & Nanotecnol, Dipartimento Fis, Politecn Milan, I-20133 Milan, Italy
来源
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS | 2009年 / 11卷 / 01期
关键词
micromachining; fs-laser writing; optical waveguides; photonic devices; power splitters; directional couplers; interferometers; Bragg gratings; amplifiers; lasers; OPTICAL WAVE-GUIDES; FIBER BRAGG GRATINGS; DIRECTIONAL COUPLER WRITTEN; REFRACTIVE-INDEX CHANGE; 1.5; MU-M; FUSED-SILICA; LITHIUM-NIOBATE; POLY(METHYL METHACRYLATE); PHASE MASK; IR LASER;
D O I
10.1088/1464-4258/11/1/013001
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this paper we review the micromachining of photonic devices in several materials by means of ultrashort laser pulses. The physical mechanisms underlying the refractive index modification and the different laser systems used to induce such modification are discussed. A thorough review of the photonic devices demonstrated with the femtosecond laser microfabrication technique is presented. In particular, this paper is focused on photonic devices based on optical waveguides. The devices are organized into two categories: passive and active devices. In the former category power splitters, directional couplers, interferometers and Bragg gratings are reviewed, while in the latter amplifiers and lasers are discussed. Finally, conclusions and future perspectives of femtosecond laser micromachining in photonics are provided.
引用
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页数:18
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