THREE-DIMENSIONAL MICRO AND NANOCHIPS FABRICATED BY FEMTOSEDOND LASER FOR BIOMEDICAL APPLICATIONS

被引：0

作者：

Sugioka, Koji ^{[1
,1
]}

Cheng, Ya ^{[1
]}

Midorikawa, Katsumi ^{[1
]}

机构：

[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan

来源：

PHOTON-BASED NANOSCIENCE AND NANOBIOTECHNOLOGY | 2006年 / 239卷

关键词：

microchip; nanochip; lab-on-a-chip; mu-TAS; 3D fabrication; laser micromachining; femtosecond laser;

D O I：

暂无

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by a photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined.

引用

页码：307 / 332

页数：26

共 50 条

[31] Novel functionality of three-dimensional nanostructured devices fabricated with femtosecond pulse laser
Cai, Wenjian
Libertun, Ariel
Piestun, Rafael
2007 SBMO/IEEE MTT-S INTERNATIONAL MICROWAVE AND OPTOELECTRONICS CONFERENCE, VOLS 1 AND 2, 2007, : 470 - 473
[32] Three-dimensional staggered herringbone mixer fabricated by femtosecond laser direct writing
Lin, Di
He, Fei
Liao, Yang
Lin, Jintian
Liu, Changning
Song, Jiangxin
Cheng, Ya
JOURNAL OF OPTICS, 2013, 15 (02)
[33] Silicon three-dimensional structures fabricated by femtosecond laser modification with dry etching
Liu, Xue-Qing
Yu, Lei
Ma, Zhuo-Chen
Chen, Qi-Dai
APPLIED OPTICS, 2017, 56 (08) : 2157 - 2161
[34] Three-dimensional photonic devices fabricated in glass by use of a femtosecond laser oscillator
Kowalevicz, AM
Sharma, V
Ippen, EP
Fujimoto, JG
Minoshima, K
OPTICS LETTERS, 2005, 30 (09) : 1060 - 1062
[35] THREE-DIMENSIONAL (3D) MAGNETIC DROPLET MANIPULATION FOR BIOMEDICAL APPLICATIONS
Park, Yuna
Jean, Jinpyo
Chung, Sang Kug
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018, : 1283 - 1285
[36] Novel three-dimensional printing of poly(ester urethane) scaffolds for biomedical applications
Lores, Nayla J.
Hung, Xavier
Talou, Mariano H.
Abraham, Gustavo A.
Caracciolo, Pablo C.
POLYMERS FOR ADVANCED TECHNOLOGIES, 2021, 32 (08) : 3309 - 3321
[37] Real-time three-dimensional digital image correlation for biomedical applications
Wu, Rong
Wu, Hua
Arola, Dwayne
Zhang, Dongsheng
JOURNAL OF BIOMEDICAL OPTICS, 2016, 21 (10)
[38] Three-dimensional bio-derived materials for biomedical applications: challenges and opportunities
Singaravelu, Sivakumar
Abrahamse, Heidi
Kumar, Sathish Sundar Dhilip
RSC ADVANCES, 2025, 15 (12) : 9375 - 9397
[39] A Simple Creation of Freestanding Three-Dimensional Microstructures by Aligned Maskmicromolding for Biomedical Applications
Li, Hui
Wang, Lei
Zhang, Jinyong
Flynn, T. J.
Stephens, Scott
Trinkle, Christine
2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2017, : 631 - 634
[40] Fabrication of three-dimensional PCL/BiFeO3 scaffolds for biomedical applications
Ulag, Songul
Kalkandelen, Cevriye
Bedir, Tuba
Erdemir, Gokce
Kuruca, Serap Erdem
Dumludag, Fatih
Ustundag, Cem Bulent
Rayaman, Erkan
Ekren, Nazmi
Kilic, Beyhan
Gunduz, Oguzhan
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2020, 261

← 1 2 3 4 5 →