THREE-DIMENSIONAL MICRO AND NANOCHIPS FABRICATED BY FEMTOSEDOND LASER FOR BIOMEDICAL APPLICATIONS

被引：0
|
作者：
Sugioka, Koji [1 ,1 ]
Cheng, Ya [1 ]
Midorikawa, Katsumi [1 ]
机构：
[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
来源：
PHOTON-BASED NANOSCIENCE AND NANOBIOTECHNOLOGY | 2006年 / 239卷
关键词：
microchip; nanochip; lab-on-a-chip; mu-TAS; 3D fabrication; laser micromachining; femtosecond laser;
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by a photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined.
引用
收藏
页码：307 / 332
页数：26
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