Nano-structure study of ZnO thin films on sapphire grown with different temperature conditions

被引:7
作者
Chin, Shu-Cheng
Chi, Chun-Yung
Lu, Yen-Cheng
Hong, Lin
Lin, Yu-Li
Jen, Fang-Yi
Yang, C. C.
Zhang, Bao-Ping
Segawa, Yusaburo
Ma, Kung-Jen
Yang, Jer-Ren
机构
[1] Natl Taiwan Univ, Grad Inst Electroopt Engn, Taipei, Taiwan
[2] Natl Taiwan Univ, Dept Elect Engn, Taipei, Taiwan
[3] RIKEN, Photodynam Res Ctr, Inst Phys & Chem Res, Sendai, Miyagi, Japan
[4] Chung Hua Univ, Dept Mech Engn, Hsinchu, Taiwan
[5] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei 10764, Taiwan
关键词
exciton; growth temperature; nanostructure; photon emission efficiency; transmission electron microscopy; ZnO;
D O I
10.1016/j.jcrysgro.2006.05.043
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We compared the nano-structures of three samples of ZnO thin film on sapphire under different growth temperature conditions. Although disconnected domain structures (on the scale of 100 nm in size) were observed in the samples of high-temperature (450 degrees C) growth, their crystal quality is generally better than the one grown at a low temperature (200 degrees C), either near or away from the sapphire interface. Lattice misfits and threading dislocations were observed within a domain with the separation of around 8 nm. The sample grown at the low temperature showed a continuous structure through the ZnO layer although void-like structures might exist inside. However, its crystal quality is relatively poorer. Of the two samples with high-temperature growth, the one with initial low-temperature growth had a larger domain structure (around 150 nm in size) and relatively lower crystal quality. In particular, strong strains existed near the interface of this sample. The samples of high-temperature growth generally have higher photon emission efficiencies. Temperature-dependent integrated photoluminescence intensities of the high-temperature-growth samples show that the exciton trapping by either intrinsic donors or acceptors leads to a higher thermal quenching rate in comparison with free excitons. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:344 / 350
页数:7
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