Internal oxidation and mechanical properties of Ru based alloy coatings

被引：7

作者：

Chen, Yung-I ^{[1
]}

Chu, Hsiu-Nuan ^{[1
]}

Chang, Li-Chun ^{[2
,3
]}

Lee, Jyh-Wei ^{[2
,3
]}

机构：

[1] Natl Taiwan Ocean Univ, Inst Mat Engn, Keelung 20224, Taiwan

[2] Ming Chi Univ Technol, Dept Mat Engn, New Taipei City 24301, Taiwan

[3] Ming Chi Univ Technol, Ctr Thin Film Technol & Applicat, New Taipei City 24301, Taiwan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2014年 / 32卷 / 02期

关键词：

METALS; ZR; TI; HF;

D O I：

10.1116/1.4826585

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ru based laminated coatings with various transition metal solutes were deposited on silicon wafers using a direct current magnetron cosputtering system. After annealing in a 1% O-2-Ar atmosphere at 600 degrees C for 30 min, Ti-Ru, Zr-Ru, Mo-Ru, Hf-Ru, and W-Ru coatings were internally oxidized and maintained a laminated structure, consisting of alternating oxygen-rich and deficient layers stacked along the original growth direction. Conversely, V-Ru and Cr-Ru coatings exhibited external oxidation and failed to maintain the laminated structure after annealing, due to the fast outward diffusion of V and Cr. The variations in crystalline structure and nanohardness of Ru based coatings caused by oxidation after annealing were investigated. (C) 2014 American Vacuum Society.

引用

页数：8

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