Local structure of Fe-doped In2O3 films investigated by X-ray absorption fine structure spectroscopy

被引：0
作者：
An, Yukai [1 ]
Wang, Shiqi [1 ]
Feng, Deqiang [1 ]
Wu, Zhonghua [2 ]
Liu, Jiwen [1 ]
机构：
[1] Tianjin Univ Technol, Key Lab Display Mat & Photoelect Devices, Minist Educ, Tianjin Key Lab Photoelect Mat & Devices,Sch Mat, Tianjin 300384, Peoples R China
[2] Chinese Acad Sci, BSRF, Inst High Energy Phys, Beijing 100049, Peoples R China
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2014年 / 115卷 / 03期
基金：
中国国家自然科学基金;
关键词：
TEMPERATURE FERROMAGNETISM; MAGNETIC-PROPERTIES; MN; CO;
D O I：
10.1007/s00339-013-7868-z
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
films were deposited on Si (100) substrates by RF-magnetron sputtering technique. The influence of Fe doping on the local structure of films was investigated by X-ray absorption spectroscopy (XAS) at Fe K-edge and L-edge. For the films with , Fe ions dissolve into and substitute for sites with a mixed-valence state () of Fe ions. However, a secondary phase of Fe metal clusters is formed in the films with . The qualitative analyses of Fe-K edge extended X-ray absorption fine structure (EXAFS) reveal that the Fe-O bond length shortens and the corresponding Debye-Waller factor () increases with the increase of Fe concentration, indicating the relaxation of oxygen environment of Fe ions upon substitution. The anomalously large structural disorder and very short Fe-O distance are also observed in the films with high Fe concentration. Linear combination fittings at Fe L-edge further confirm the coexistence of and with a ratio of () for the film with . However, a significant fraction () of the Fe metal clusters is found in the film with .
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收藏
页码：823 / 828
页数：6
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