Six laws of low-energy electron scattering in solids

Relativistic partial wave elastic scattering (Mott cross-sections) and dielectric energy losses with the full dispersion relation and corresponding momentum changes should explain the anomalous decrease of electron backscattering towards the sub-keV energy region. Respective Monte Carlo programs are in good agreement with electron backscattering and transmission experiments. As a main result, several scattering and transport quantities can be correlated with the total backscattering ratio eta(BO)(Z, E-0) including the dependence on the atomic number Z of the target material as well as on the initial electron energy Ell. All depth distributions can be expressed by the reduced depth x/R related to the maximum electron range R(E-0). Thus a much easier access, e.g. to the angle-dependent backscattering, to the mean energy of backscattered electrons, to the electron penetration rate, and to the energy transfer profile in solid targets is given. (C) 2004 Elsevier B.V. All rights reserved.