Cryogenic testing of a unimorph-type deformable mirror and theoretical material optimization

被引：3

作者：

Goy, Matthias ^{[1
]}

Reinlein, Claudia ^{[1
]}

Kinast, Jan ^{[1
]}

Lange, Nicolas ^{[1
]}

机构：

[1] Univ Jena, Inst Appl Phys, Fraunhofer Inst Appl Opt & Precis Engn, D-07745 Jena, Germany

来源：

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2014年 / 13卷 / 01期

关键词：

deformable mirror; unimorph; thermally induced deformation; cryogenic testing; athermal design; ELASTIC PROPERTIES; STYCAST-1266;

D O I：

10.1117/1.JMM.13.1.011107

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The testing of a lightweight unimorph-type deformable mirror (DM) for wavefront correction in cryogenic instruments is reported. The presented mirror manufactured from the titanium alloy TiAl6V4 with a piezoelectric disk actuator was cooled to 86 K and characterized for thermally induced deformation and the achievable piezoelectric stroke between room temperature and 86 K. Through a finite element analysis, we obtained a first approximation in determining the exact temperaturedependent coefficient of thermal expansion (CTE) of the piezo material PIC151. Simulations were based on dilatometer measurements of the CTE of the TiAl6V4 mirror base between room temperature and 86 K. These investigations will enable the improvement of the athermal design of a unimorph-type DM. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)

引用

页数：6

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