Inducing analytical orthogonality in tungsten oxide-based microsensors using materials structure and dynamic temperature control

被引:11
作者
Benkstein, K. D. [1 ]
Raman, B. [1 ,2 ]
Lahr, D. L. [1 ]
Bonevich, J. E. [3 ]
Semancik, S. [1 ]
机构
[1] NIST, Chem Sci & Technol Lab, Gaithersburg, MD 20899 USA
[2] NICHHD, Lab Cellular & Synapt Neurophysiol, NIH, Bethesda, MD 20892 USA
[3] NIST, Mat Sci & Engn Lab, Gaithersburg, MD 20899 USA
关键词
Chemiresistor; Microhotplate; Nanowire; Nanoparticle; NANOWIRES; SENSOR; METAL; FABRICATION; NANOFIBERS; AMMONIA; FILMS; CO;
D O I
10.1016/j.snb.2008.10.029
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The influence of material Structure and dimension on the chemical sensing performance was investigated as a function of sensor operating temperature. Polycrystalline tungsten oxides (WO3) were prepared both as nanowires of different diameters (d approximate to 100 nm, 175 non; l = 4-5 mu m) using a template-directed electrodeposition process, and as a continuous film through thermal decomposition of peroxytungstate solution. The WO3 materials were integrated with microscale conductometric platforms featuring millisecond dynamic temperature control up to 500,C. The nanowires and film were assessed for efficacy as transducers in gas-phase chemical sensors using these platforms, both in a fixed-temperature operating mode and in a dynamic pulsed-temperature operating mode. Statistical analysis of the tungsten oxide chemiresistor responses to analytes at varied operating temperatures revealed that orthogonal information can be obtained from stoichiometrically similar materials; the differences were exaggerated by probing the sensor responses with different dynamic temperature programs. We conclude that nanowire sensors yield non-redundant analytical information with respect to their complementary film-based sensor. These results demonstrate that as sensors move to nanoscale Structures, unique interactions will differentiate the materials and the devices' performance from their microscale counterparts. Published by Elsevier B.V.
引用
收藏
页码:48 / 55
页数:8
相关论文
共 36 条
[1]   Conduction model of metal oxide gas sensors [J].
Barsan, N ;
Weimar, U .
JOURNAL OF ELECTROCERAMICS, 2001, 7 (03) :143-167
[2]   Mesoporous nanoparticle TiO2 thin films for conductometric gas sensing on microhotplate platforms [J].
Benkstein, KD ;
Semancik, S .
SENSORS AND ACTUATORS B-CHEMICAL, 2006, 113 (01) :445-453
[3]   Integration of nanostructured materials with MEMS microhotplate platforms to enhance chemical sensor performance [J].
Benkstein, Kurt D. ;
Martinez, Carlos J. ;
Li, Guofeng ;
Meier, Douglas C. ;
Montgomery, Christopher B. ;
Semancik, Steve .
JOURNAL OF NANOPARTICLE RESEARCH, 2006, 8 (06) :809-822
[4]   ELECTRONIC-STRUCTURE OF TUNGSTEN AND SOME OF ITS BORIDES, CARBIDES, NITRIDES, AND OXIDES BY X-RAY ELECTRON-SPECTROSCOPY [J].
COLTON, RJ ;
RABALAIS, JW .
INORGANIC CHEMISTRY, 1976, 15 (01) :236-238
[5]   Single crystal ZnO nanowires as optical and conductometric chemical sensor [J].
Comini, E. ;
Baratto, C. ;
Faglia, G. ;
Ferroni, M. ;
Sberveglieri, G. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (23) :7255-7259
[6]   Metal oxide nano-crystals for gas sensing [J].
Comini, Elisabetta .
ANALYTICA CHIMICA ACTA, 2006, 568 (1-2) :28-40
[7]   A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique [J].
Dai, Ching-Liang ;
Liu, Mao-Chen ;
Chen, Fu-Song ;
Wu, Chyan-Chyi ;
Chang, Ming-Wei .
SENSORS AND ACTUATORS B-CHEMICAL, 2007, 123 (02) :896-901
[8]   Gas sensing behaviour of mat-like networked tungsten oxide nanowire thin films [J].
Deb, B. ;
Desai, S. ;
Sumanasekera, G. U. ;
Sunkara, M. K. .
NANOTECHNOLOGY, 2007, 18 (28)
[9]  
Duda R.O., 1973, Pattern Classification and Scene Analysis
[10]   Metal and metal oxide nanoparticles in chemiresistors: Does the nanoscale matter? [J].
Franke, ME ;
Koplin, TJ ;
Simon, U .
SMALL, 2006, 2 (01) :36-50