Composition-dependent crystallization enhancing moisture-barrier performance in In-Zn-O thin films

被引：4
作者：
Choi, Yun-Hyuk
Hong, Seong-Hyeon [1 ]
机构：
[1] Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151744, South Korea
来源：
MATERIALS LETTERS | 2015年 / 159卷
基金：
新加坡国家研究基金会;
关键词：
In-Zn-O; Crystallization; Thin film; Sputtering; Gas barrier; OXIDE-FILMS; CRYSTALLINITY; ENCAPSULATION; PERMEABILITY; PERMEATION; POLYMERS;
D O I：
10.1016/j.matlet.2015.07.046
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The comparative moisture-barrier performance of amorphous and crystalline inorganic oxide thin films deposited on polymer substrates by sputtering at room temperature is reported using the composition (In vs. Zn ratio)-dependent crystallization in In-Zn-O (IZO) homologous phase. The water vapor transmission rate of IZO thin film decreased by more than an order of magnitude when the crystallinity of the films increased with increasing Zn content. This result suggests that the crystallization can improve the gas-barrier performance in inorganic barrier films. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：381 / 384
页数：4
相关论文
共 18 条
[1]   Reactions and diffusion of water and oxygen molecules in amorphous SiO2 -: art. no. 055508 [J].
Bakos, T ;
Rashkeev, SN ;
Pantelides, ST .
PHYSICAL REVIEW LETTERS, 2002, 88 (05) :4
[2]   Fuzzy Nanoassembly of Polyelectrolyte and Layered Clay Multicomposite toward a Reliable Gas Barrier [J].
Choi, Jin Hwan ;
Park, Young Wook ;
Park, Tae Hyun ;
Song, Eun Ho ;
Lee, Hyun Jun ;
Kim, Hakkoo ;
Shin, Se Joong ;
Fai, Vincent Lau Chun ;
Ju, Byeong-Kwon .
LANGMUIR, 2012, 28 (17) :6826-6831
[3]   Polymers for flexible displays: From material selection to device applications [J].
Choi, Myeon-Cheon ;
Kim, Youngkyoo ;
Ha, Chang-Sik .
PROGRESS IN POLYMER SCIENCE, 2008, 33 (06) :581-630
[4]   Design and fabrication of compositionally graded inorganic oxide thin films: Mechanical, optical and permeation characteristics [J].
Choi, Y. -H. ;
Bulliard, X. ;
Benayad, A. ;
Leterrier, Y. ;
Manson, J. -A. E. ;
Lee, K. -H. ;
Choi, D. ;
Park, J. -J. ;
Kim, J. .
ACTA MATERIALIA, 2010, 58 (19) :6495-6503
[5]   Structures and textures of transparent conducting pulsed laser deposited In2O3-ZnO thin films revealed by transmission electron microscopy [J].
Dupont, L ;
Maugy, C ;
Naghavi, N ;
Guery, C ;
Tarascon, JM .
JOURNAL OF SOLID STATE CHEMISTRY, 2001, 158 (02) :119-133
[6]   Effects of the polarizability and packing density of transparent oxide films on water vapor permeation [J].
Koo, WH ;
Jeong, SM ;
Choi, SH ;
Kim, WJ ;
Baik, HK ;
Lee, SM ;
Lee, SJ .
JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (22) :11354-11360
[7]   Water Vapor Barrier Material by Covalent Self-Assembly for Organic Device Encapsulation [J].
Kopanati, Gayathri N. ;
Seethamraju, Sindhu ;
Ramamurthy, Praveen C. ;
Madras, Giridhar .
INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, 2014, 53 (46) :17894-17900
[8]   MOISTURE PERMEABILITY OF POLYMERS .1. ROLE OF CRYSTALLINITY AND ORIENTATION [J].
LASOSKI, SW ;
COBBS, WH .
JOURNAL OF POLYMER SCIENCE, 1959, 36 (130) :21-33
[9]   Al2O3/ZrO2 Nanolaminates as Ultrahigh Gas-Diffusion Barriers-A Strategy for Reliable Encapsulation of Organic Electronics [J].
Meyer, Jens ;
Goerrn, Patrick ;
Bertram, Franz ;
Hamwi, Sami ;
Winkler, Thomas ;
Johannes, Hans-Hermann ;
Weimann, Thomas ;
Hinze, Peter ;
Riedl, Thomas ;
Kowalsky, Wolfgang .
ADVANCED MATERIALS, 2009, 21 (18) :1845-+
[10]   Mechanisms of boron diffusion in silicon and germanium [J].
Mirabella, S. ;
De Salvador, D. ;
Napolitani, E. ;
Bruno, E. ;
Priolo, F. .
JOURNAL OF APPLIED PHYSICS, 2013, 113 (03)
12