Ordered Pillar Array Structures of TiO2 by Nanoimprinting Using Anodic Porous Alumina as Molds

被引:8
|
作者
Yanaishita, Takashi [1 ,2 ,3 ]
Endo, Takehide [1 ]
Yamaguchi, Yukiyasu [1 ]
Nishio, Kazuyuki [1 ,2 ]
Masuda, Hideki [1 ,2 ]
机构
[1] Tokyo Metropolitan Univ, Dept Appl Chem, Hachioji, Tokyo 1920397, Japan
[2] Kanagawa Acad Sci & Technol, Sagamihara, Kanagawa 2291131, Japan
[3] JST, PRESTO, Kawaguchi, Saitama 3320012, Japan
基金
日本科学技术振兴机构;
关键词
REPLICATION; LITHOGRAPHY;
D O I
10.1246/cl.2009.274
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Ordered pillar array structures of TiO2 were prepared by nanoimprinting process using ordered anodic porous alumina as a mold. The shape of the obtained pillars of TiO2 corresponded to that of the holes of anodic porous alumina used as a mold. The geometric structure of the TiO2 pillar array could be controlled by the condition of the formation of the anodic porous alumina molds.
引用
收藏
页码:274 / 275
页数:2
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