Low-cost nanomanipulator for in situ experiments in a SEM

被引:8
|
作者
Nakabayashi, Denise
Silva, Paulo C.
Gonzalez, Juan C.
Rodrigues, Varlei
Ugarte, Daniel
机构
[1] Lab Nacl Luz Sincrotron, BR-13084971 Campinas, SP, Brazil
[2] Univ Estadual Campinas, Inst Fis Gleb Wataghin, BR-13081970 Campinas, SP, Brazil
关键词
nanomanipulator; scanning electron microscope; nanosystems;
D O I
10.1017/S1431927606060338
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Here, we describe the development of an inexpensive and versatile manipulation system for in situ experiments in a field emission scanning electron microscope based on a parallel-guiding plate-spring mechanism and low cost materials. The system has been tested for a wide range of applications, such as collecting, moving, and positioning particles, fabricating atomic force microscopy tips based on carbon nanotubes, and characterizing individual nanobjects. The nanomanipulation results demonstrate that there are many opportunities for the use of physical manipulation in the bottom-up approach to fabrication of nanodevices.
引用
收藏
页码:311 / 316
页数:6
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