The interaction of atomic hydrogen with ZnO depends on ZnO polarity. O-polar (000-1) ZnO is stable to atomic hydrogen; Zn-polar (0001) ZnO is partially attacked by atomic hydrogen, affording a self-inhibiting reaction that enriches the surface in metallic Zn; nonpolar (11-20) ZnO is completely etched by atomic hydrogen; and the nonpolar (10-10) ZnO is roughened during interaction with atomic hydrogen.