Compact models for squeeze-film damping in the slip flow regime

被引:0
作者
Sattler, R [1 ]
Wachutka, G [1 ]
机构
[1] Tech Univ Munich, Inst Phys Electrotechnol, D-80290 Munich, Germany
来源
NSTI NANOTECH 2004, VOL 2, TECHNICAL PROCEEDINGS | 2004年
关键词
squeeze-film damping; mixed-level modeling; compact model; slip flow; finite network;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We propose a mixed-level simulation scheme for squeeze film damping effects in microdevices, which makes it possible to include damping effects in system-level models of entire microsystems in a natural, physically-based and flexible way. Our approach allows also for complex geometries, large deflection and coupling to other energy domains. In this work, we focus on the extension of our model to the slip flow regime. To this end, the flow problem is separated into appropriate blocks. For each block the slip factor is derived analytically or extracted from FEM simulations based on the Navier-Stokes equation with slip boundary conditions. Our fully parametrized and, therefore, predictive mixed-level model could be verified by FEM and experimental analysis.
引用
收藏
页码:243 / 246
页数:4
相关论文
共 12 条
[1]   A phenomenological lubrication model for the entire Knudsen regime [J].
Bahukudumbi, P ;
Beskok, A .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (06) :873-884
[2]  
BURGDORFER A, 1959, ASME, P94
[3]   A DATABASE FOR INTERPOLATION OF POISEUILLE FLOW-RATES FOR HIGH KNUDSEN NUMBER LUBRICATION PROBLEMS [J].
FUKUI, S ;
KANEKO, R .
JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1990, 112 (01) :78-83
[4]  
HASIMOTO H, 1958, J PHYS SOC JPN, V13, P633
[5]  
SATTLER R, UNPUB DTIP 04 MONTR
[6]  
SATTLER R, MSM 03, P284
[7]  
SATTLER R, MSM 02, P124
[8]  
SCHAAF SA, 1953, J AERONAUT SCI, V21, P85
[9]   Physically based modeling of squeeze film damping by mixed-level system simulation [J].
Schrag, G ;
Wachutka, G .
SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 :193-200
[10]   Data on internal rarefied gas flows [J].
Sharipov, F ;
Seleznev, V .
JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1998, 27 (03) :657-706