Research of wide range resonant pressure sensor

被引：0

作者：

Barauskas, D. ^{[1
]}

Virzonis, D. ^{[1
]}

Pelenis, D. ^{[1
]}

Sergalis, G. ^{[1
]}

Sapeliauskas, E. ^{[1
]}

机构：

[1] Kaunas Univ Technol, LT-37164 Panevezys, Lithuania

来源：

INTELLIGENT TECHNOLOGIES IN LOGISTICS AND MECHATRONICS SYSTEMS - ITELMS'2015 | 2015年

关键词：

CMUT; pressure sensor; resonant sensor;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

This paper presents a research of a resonant pressure sensor that could potentially work in wide range, ranging from 10(5) Pa to 800 kPa relative to normal atmospheric pressure. A capacitive micromachined ultrasound transducer (CMUT) was designed, fabricated, assembled and tested. Experiments with the device showed that the sensitivity of the sensor in the relative pressure range from 0 to 200 kPa is up to 355 Hz/kPa.

引用

页码：51 / 55

页数：5