Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges

被引：36
作者：
Shan, Guanqiao [1 ]
Li, Yingzi
Zhang, Liwen
Wang, Zhenyu
Zhang, Yingxu
Qian, Jianqiang
机构：
[1] Beihang Univ, Key Lab Micronano Measurement Manipulat & Phys, Minist Educ, Beijing 100191, Peoples R China
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2015年 / 86卷 / 10期
基金：
北京市自然科学基金; 中国国家自然科学基金;
关键词：
HYSTERESIS COMPENSATION; MOTION CONTROL; TABLE SYSTEM; DISK-DRIVE; FINE STAGE; DESIGN; ROBUST; ACTUATOR; SCANNER; MODELS;
D O I：
10.1063/1.4932580
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. The VCM structure is both compact and flexible; hence, it is convenient to design VCMs for a variety of stage structures. Furthermore, VCMs combined with other actuators are able to achieve large travel ranges with high precision. In this paper, we summarize the principles and control methods of a typical VCM, and we analyze its properties, including thrust force, acceleration, and response time. We then present recent research on high-precision VCM positioning stages with large travel ranges. (C) 2015 AIP Publishing LLC.
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页数：9
相关论文
共 95 条
[51]   Design of decoupled dual servo stage with voice coil motor and linear motor for XY long stroke ultra-precision scanning system [J].
Kim, KH ;
Choi, YM ;
Gweon, DG ;
Hong, DP ;
Kim, KS ;
Lee, SW ;
Lee, MG .
ICMIT 2005: MECHATRONICS, MEMS, AND SMART MATERIALS, 2005, 6040
[52]   A novel laser micro/nano-machining system for FPD process [J].
Kim, Kihyun ;
Choi, Young-Man ;
Gweon, Dea-Gab ;
Lee, Moon G. .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2008, 201 (1-3) :497-501
[53]   Dual Servo Stage Without Mechanical Coupling for Process of Manufacture and Inspection of Flat Panel Displays Via Modular Design Approach [J].
Kim, Kihyun ;
Cho, Young-Man ;
Nam, Byoung-Uk ;
Lee, Moon Gu .
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2012, 13 (03) :407-412
[54]   A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges [J].
Kurisaki, Yugo ;
Sawano, Hiroshi ;
Yoshioka, Hayato ;
Shinno, Hidenori .
JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING, 2010, 4 (05) :976-984
[55]   Compliance and control characteristics of an additive manufactured-flexure stage [J].
Lee, ChaBum ;
Tarbutton, Joshua A. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 86 (04)
[56]   Robust design of a novel three-axis fine stage for precision positioning in lithography [J].
Lee, D-J ;
Kim, K. ;
Lee, K-N ;
Choi, H. G. ;
Park, N-C ;
Park, Y-P ;
Lee, M. G. .
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2010, 224 (C4) :877-888
[57]   Integrated Design Method of Multi-Axis VCM Actuators Based on Coupled-Field-Analysis of Electro-Magnetics and Structure [J].
Lee, Dong-Ju ;
Kim, Jai Ha .
IEEE TRANSACTIONS ON MAGNETICS, 2009, 45 (05) :2340-2343
[58]  
Lee H., 2007, IEEE ASME INT C ADV, P1
[59]  
Lee HS, 1996, IEEE T IND ELECTRON, V43, P48, DOI 10.1109/41.481407
[60]   Adaptive Dynamic Sliding-Mode Fuzzy CMAC for Voice Coil Motor Using Asymmetric Gaussian Membership Function [J].
Lin, Chih-Min ;
Li, Hsin-Yi .
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2014, 61 (10) :5662-5671
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