Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges

被引：36

作者：

Shan, Guanqiao ^{[1
]}

Li, Yingzi

Zhang, Liwen

Wang, Zhenyu

Zhang, Yingxu

Qian, Jianqiang

机构：

[1] Beihang Univ, Key Lab Micronano Measurement Manipulat & Phys, Minist Educ, Beijing 100191, Peoples R China

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2015年 / 86卷 / 10期

基金：

北京市自然科学基金; 中国国家自然科学基金;

关键词：

HYSTERESIS COMPENSATION; MOTION CONTROL; TABLE SYSTEM; DISK-DRIVE; FINE STAGE; DESIGN; ROBUST; ACTUATOR; SCANNER; MODELS;

D O I：

10.1063/1.4932580

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. The VCM structure is both compact and flexible; hence, it is convenient to design VCMs for a variety of stage structures. Furthermore, VCMs combined with other actuators are able to achieve large travel ranges with high precision. In this paper, we summarize the principles and control methods of a typical VCM, and we analyze its properties, including thrust force, acceleration, and response time. We then present recent research on high-precision VCM positioning stages with large travel ranges. (C) 2015 AIP Publishing LLC.

引用

页数：9

共 95 条

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