Semiconductor Material and Device Characterization via Scanning Microwave Microscopy

被引：0

作者：

Tanbakuchi, Hassan ^{[1
]}

Kienberger, Ferry ^{[1
]}

Richter, Matt ^{[1
]}

Dieudonne, Michael ^{[1
]}

Kasper, Manuel ^{[2
]}

Gramse, Georg ^{[2
]}

机构：

[1] Agilent Technol, Vienna, Austria

[2] Johannes Kepler Univ Linz, Vienna, Austria

来源：

2013 IEEE COMPOUND SEMICONDUCTOR INTEGRATED CIRCUIT SYMPOSIUM (CSICS): INTEGRATED CIRCUITS IN GAAS, INP, SIGE, GAN AND OTHER COMPOUND SEMICONDUCTORS | 2013年

关键词：

Scanning Microwave Microscope (SMM); Dopant profile; Network Analyzer(VNA); Scanning Probe Microscope (SPM);

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The advent of the new nano-scale high speed materials and devices require metrology tools capable of characterization at the operating frequency range with nano-scale resolution. The non-destructive measurement of dopant profile and carrier concentration in 2D and 3D are critical in the new emerging materials and devices such as carbon nanotubes, graphene, nanowires and spintronics. A new Scanning Microwave Microscope (SMM) has been developed to characterize the material and devices at microwave frequencies with nanometer resolution. The SMM has been shown to be capable of quantitative characterization of metals, semiconductors and dielectrics.

引用

页数：4

共 4 条

[1]

Hoffmann J., 2012, 12 IEEE NANO

[2] Calibrated nanoscale dopant profiling using a scanning microwave microscope [J].

Huber, H. P. ;

Humer, I. ;

Hochleitner, M. ;

Fenner, M. ;

Moertelmaier, M. ;

Rankl, C. ;

Imtiaz, A. ;

Wallis, T. M. ;

Tanbakuchi, H. ;

Hinterdorfer, P. ;

Kabos, P. ;

Smoliner, J. ;

Kopanski, J. J. ;

Kienberger, F. .

JOURNAL OF APPLIED PHYSICS, 2012, 111 (01)

[3] Calibrated nanoscale capacitance measurements using a scanning microwave microscope [J].

Huber, H. P. ;

Moertelmaier, M. ;

Wallis, T. M. ;

Chiang, C. J. ;

Hochleitner, M. ;

Imtiaz, A. ;

Oh, Y. J. ;

Schilcher, K. ;

Dieudonne, M. ;

Smoliner, J. ;

Hinterdorfer, P. ;

Rosner, S. J. ;

Tanbakuchi, H. ;

Kabos, P. ;

Kienberger, F. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (11)

[4]

Wu S., 2013, SCANNING PROBE MICRO

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