Laser methods based on an analysis of scattered light for automated, in-process inspection of machined surfaces: A review

被引：17

作者：

Kaplonek, Wojciech ^{[1
]}

Nadolny, Krzysztof ^{[2
]}

机构：

[1] Koszalin Univ Technol, Dept Prod Engn, Fac Mech Engn, Subject Grp Metrol & Qual, PL-75620 Koszalin, Poland

[2] Koszalin Univ Technol, Dept Prod Engn, Fac Mech Engn, PL-75620 Koszalin, Poland

来源：

OPTIK | 2015年 / 126卷 / 20期

关键词：

Optical metrology; Laser scattering methods; In-process inspection; Machined surfaces; Surface texture; ROUGHNESS MEASUREMENT; ONLINE MEASUREMENT; ENGINEERING SURFACES; ABRASIVE TOOLS; SYSTEM; FINISH; INSTRUMENT; WORKPIECE; VISION; PROBE;

D O I：

10.1016/j.ijleo.2015.07.009

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This work presents a concise review of selected issues related to non-contact optical metrology in applications where automated, in-process inspection is involved. A brief description of this type of inspection and its methods, which can be applied are presented. Particular attention was paid to laser methods based on an analysis of scattered light. In addition to the above, a short review of selected technical solutions in the form of an experimental and commercially manufactured measurement system was presented. This review concentrates on describing the most important metrological parameters, the principles of operation and the areas of application of the aforementioned measurement systems. (C) 2015 Elsevier GmbH. All rights reserved.

引用

页码：2764 / 2770

页数：7

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