Miniature and MEMS-type vacuum sensors and pumps

In the paper, the observable trends of the actual research and development of selected types of miniature and MEMS-type vacuum sensors are presented. Some information about the new types of active vacuum gauges, which are offered by the leading manufacturers of the vacuum measurement instruments, is given. Next, the list of MEMS devices that need vacuum for proper operation is presented. Some aspects of vacuum-encapsulation of MEMS devices, on wafer level and package level are shown. The new conceptions of obtaining and maintenance of high and ultra-high vacuum in MEMS devices are described. They concern the conception of integration of a miniature orbitron pump on-chip with MEMS-type device or with vacuum part of the portable advanced instruments such as electron microscope, ion mass spectrometer, and free electron laser. (C) 2009 Elsevier Ltd. All rights reserved.