共 52 条
- [1] Bayard-Alpert vacuum gauge with microtips [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03): : 2119 - 2125
- [3] Microstructural pressure sensor based on an enhanced resonant mode hysteresis effect [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (05): : 1828 - 1832
- [5] IONIZATION GAUGE USING A SIC P-N JUNCTION ELECTRON EMITTER [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (01): : 214 - &
- [6] Dozoretz P., 2005, Shrinking the pirani vacuum gauge
- [7] DUVET L, 1999, IVMC 9 11 DARMST GER, P34
- [10] Vacuum measurement on vacuum packaged MEMS devices [J]. 4th International Symposium on Instrumentation Science and Technology (ISIST' 2006), 2006, 48 : 1429 - 1434