A study of hydrogen sensing performance of Pt-GaN Schotty diodes

被引:24
|
作者
Ali, Majdeddin [1 ]
Cimalla, Volker
Lebedev, Vadim
Tilak, Vinayak
Sandvik, Peter M.
Merfeld, Danielle W.
Ambacher, Oliver
机构
[1] Tech Univ Ilmenau, Ctr Micro & Nanotechnol, D-98693 Ilmenau, Germany
[2] Gen Elect, Global Res Ctr, Micro & Nano Struct Technol, Niskayuna, NY 12309 USA
关键词
GaN; platinum; recovery time; response time; Schottky diodes; sensitivity;
D O I
10.1109/JSEN.2006.881346
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The performance of hydrogen-gas detectors based on Pt-GaN Schottky diodes with 24-nm-thick Pt contact was investigated. Current-voltage (I-V) Characteristics were measured in two ambients (e.g., synthetic air (20% O-2 in N-2) and 1-vol.% H-2 in synthetic air) at different temperatures. The forward current of the diodes is found to increase significantly upon introduction of H2 into the synthetic air ambient. Analysis of the I-V characteristics as a function of temperature demonstrated that the observed current increase is due to a decrease in the effective barrier height (BH) through a decrease in the Pt work function upon absorption of hydrogen. The decrease in the BH was measured as high as 30 and 152 meV at 25 degrees C and at 280 degrees C, respectively, upon introduction of H-2 into the ambient. The changes in the BH were completely reversible upon restoration of the synthetic air ambient. The sensitivity to the hydrogen gas was investigated in dependence on the operating temperature for 1-vol.% hydrogen in synthetic air. The changes in the forward bias at a constant current density of 3.2 A/cm(2) was 90 and 330 mV at 25 degrees C and at 310 degrees C, respectively, upon introduction of 1-vol.% H-2 into the ambient. Additionally, a significant increase in the sensitivity and a decrease in the response and recovery times have been observed after increasing the operating temperature up to similar to 310 degrees C.
引用
收藏
页码:1115 / 1119
页数:5
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