Structural and optical properties of GaN films grown on GaAs substrates by molecular beam epitaxy

被引:5
作者
Maksimov, O. [1 ]
Gong, Y.
Du, H.
Fisher, P.
Skowronski, M.
Kuskovsky, I. L.
Heydemann, V. D.
机构
[1] Penn State Univ, Ctr Electroopt, Freeport, PA 16229 USA
[2] CUNY Queens Coll, Dept Phys, Flushing, NY 11367 USA
[3] Carnegie Mellon Univ, Dept Mat Sci & Engn, Pittsburgh, PA 15213 USA
关键词
molecular beam epitaxy; GaN; GaAs; PHOTOLUMINESCENCE; TEMPERATURE;
D O I
10.1016/j.vacuum.2006.01.001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
GaN films are grown on [001] GaAs substrates by plasma-assisted molecular beam epitaxy using a three-step process that consists of a substrate nitridation, deposition of a low-temperature buffer layer, and a high-temperature overgrowth. X-ray diffraction and transmission electron microscopy indicate that this method promotes prismatic growth of c-oriented alpha-GaN. Photoluminescence studies show that the emission from cubic beta-GaN inclusions dominates the spectrum. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1042 / 1045
页数:4
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